STRUCTURAL CHARACTERISTICS OF RADIATION-DAMAGE PRODUCED BY HIGH-ENERGY (2.7 MEV) ION-IMPLANTATION IN GAAS

被引：5
|
作者：
NARAYANAN, GH
SPITZER, WG
机构：
来源：
JOURNAL OF MATERIALS SCIENCE | 1978年 / 13卷 / 11期
关键词：
D O I：
10.1007/BF00808057
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
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页码：2418 / 2428
页数：11
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