REDISTRIBUTION OF DOPANTS DURING SILICIDE FORMATION - RELEVANCE OF SILICIDE DIFFUSION VERSUS MAIN MOVING SPECIES

被引：0
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作者：
MAEX, K
VANDENHOVE, L
DEKEERSMAECKER, RF
OBERLIN, JC
PERIO, A
TORRES, J
BOMCHIL, G
VANDERWEG, WF
机构：
来源：
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 1987年 / 42卷 / 236期
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中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
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页码：95 / 97
页数：3
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