THIN-FILM RADIATION SOURCES BY RADIOFREQUENCY SPUTTERING

被引：1
|
作者：
JARRETT, JH
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS | 1972年 / 102卷 / 03期
关键词：
D O I：
10.1016/0029-554X(72)90638-6
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：487 / &
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