Fabrication of 1 mu m Thickness Lead Zirconium Titanate Films Using Poly(N-vinylpyrrolidone) Added Sol-gel Method

被引：4
|
作者：
Oh, Seung Min [1 ,2 ]
Kang, Min-Gyu [1 ]
Do, Young Ho [1 ]
Kang, Chong Yun [1 ]
Yoon, Seok Jin [1 ]
Nahm, Sahn [2 ]
机构：
[1] Korea Inst Sci & Technol, Ctr Elect Mat, Seoul 136791, South Korea
[2] Korea Univ, Dept Mat Sci & Engn, Seoul 136701, South Korea
来源：
TRANSACTIONS ON ELECTRICAL AND ELECTRONIC MATERIALS | 2011年 / 12卷 / 05期
关键词：
Lead zirconate titanate; Thickness control; Poly(vinylpyrrolidone); Sol-gel;
D O I：
10.4313/TEEM.2011.12.5.222
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Lead zirconate titanate (PZT) films were fabricated on Pt/Ti/SiO2/Si substrate by the sol-gel method using a sol containing poly(N-vinylpyrrolidone) (PVP). PVP in alkoxide solutions can suppress the condensation reaction in gel films during heat treatment, and increase the viscosity of alkoxide solutions. Single-phase PZT films as thick as 1 mu m were deposited by repetitive coating with successive third-step heat treatments at 150 degrees C, 350 degrees C and 650 degrees C. After heat treatment, the films were crack free, and optically transparent. As a result, we demonstrated a PZT film with a PVP molar ratio of 0.5, which has a permittivity of 734, a dielectric loss of 0.042, a P-r of 40.5 mu C/cm(2) and an E-c of 156 kV/cm.
引用
收藏
页码：222 / 225
页数：4
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