THE STATES OF REAGENTS IN THE SYNTHESIS OF PHOSPHORUS NITRIDE IN A GLOW-DISCHARGE - SOME PROPERTIES OF THE NITRIDE

被引：0
|
作者：
MILLER, TN
RAITSIS, LS
RAITSIS, MB
SLOVETSKII, DI
机构：
来源：
HIGH ENERGY CHEMISTRY | 1980年 / 14卷 / 01期
关键词：
D O I：
暂无
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
引用
收藏
页码：55 / 59
页数：5
相关论文
共 50 条
  • [1] KINETICS AND MECHANISM OF PHOSPHORUS NITRIDE FORMATION IN A GLOW-DISCHARGE
    MILLER, TN
    POLAK, LS
    RAITSIS, LS
    RAITSIS, MB
    SLOVETSKII, DI
    HIGH ENERGY CHEMISTRY, 1980, 14 (02) : 126 - 130
  • [2] SOME PROPERTIES OF THIN ALUMINUM NITRIDE FILMS FORMED IN A GLOW-DISCHARGE
    UEMURA, Y
    TANAKA, K
    IWATA, M
    THIN SOLID FILMS, 1974, 20 (01) : 11 - 16
  • [3] SYNTHESIS OF TITANIUM NITRIDE POWDERS UNDER GLOW-DISCHARGE PLASMA
    SINGH, RP
    DOHERTY, RD
    MATERIALS LETTERS, 1990, 9 (2-3) : 87 - 89
  • [4] GLOW-DISCHARGE SYNTHESIS OF SILICON-NITRIDE PRECURSOR POWDERS
    HO, P
    BUSS, RJ
    LOEHMAN, RE
    JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) : 873 - 881
  • [5] IRON NITRIDE FILMS FORMED IN ARF GLOW-DISCHARGE
    LI, JL
    OKEEFE, TJ
    JAMES, WJ
    MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 1992, 15 (03): : 203 - 208
  • [6] ODMR IN GLOW-DISCHARGE DEPOSITED SILICON-NITRIDE
    LOWE, AJ
    CAVENETT, BC
    HOMEWOOD, KP
    POWELL, MJ
    ELLIOTT, SR
    JOURNAL OF NON-CRYSTALLINE SOLIDS, 1985, 77-8 : 735 - 738
  • [7] PARAMETERS OF A GLOW-DISCHARGE FOR THE SYNTHESIS OF PHOSPHORUS NITRIDES
    MILLER, TN
    RAITSIS, LS
    RAITSIS, MB
    SLOVETSKII, DI
    HIGH ENERGY CHEMISTRY, 1979, 13 (06) : 462 - 466
  • [8] DEPOSITION OF SILICON-NITRIDE FILMS BY MICROWAVE GLOW-DISCHARGE
    SHIMA, Y
    MIYAZAKI, T
    NAKAMURA, N
    ADACHI, E
    TOKUYAMA, T
    JAPANESE JOURNAL OF APPLIED PHYSICS, 1973, 12 (02) : 309 - 310
  • [9] GLOW-DISCHARGE MASS-SPECTROMETRY OF SPUTTERED TANTALUM NITRIDE
    AITA, CR
    MYERS, TA
    LAROCCA, WJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 18 (02): : 324 - 327
  • [10] SYNTHESIS OF PHOSPHORUS NITRIDE IN A NANOSECOND DISCHARGE
    AMIROV, RK
    ASINOVSKII, EI
    LUKIN, AD
    MARKOVETS, VV
    MILLER, TN
    RAITSIS, LS
    RAITSIS, MB
    HIGH ENERGY CHEMISTRY, 1987, 21 (01) : 62 - 65
12345