RAMAN-SPECTROSCOPY COMBINED WITH ION-BOMBARDMENT TO DEPTH PROFILE OXIDE-FILMS

被引：4
|
作者：
HAMILTON, JC
BENNER, RE
MILLS, BE
机构：
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1982年 / 20卷 / 04期
关键词：
D O I：
10.1116/1.571649
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：946 / 947
页数：2
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