SEM CHARACTERIZATION OF MULTILAYER STRUCTURES

被引：3
|
作者：
ARISTOV, VV
DRYOMOVA, NN
KIREEV, VA
RAZGONOV, II
YAKIMOV, EB
机构：
来源：
ACTA PHYSICA POLONICA A | 1993年 / 83卷 / 01期
关键词：
D O I：
10.12693/APhysPolA.83.81
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
The possibilities of non-destructive multilayer structure characterization using the backscattering electron and modulated cathodoluminescence modes of the SEM have been discussed. It is shown that these techniques allow one to measure the parameters of thin layers of the thickness of about 10 nm.
引用
收藏
页码：81 / 86
页数：6
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