FIBER OPTIC LOW-COHERENCE INTERFEROMETRY FOR NONINVASIVE SILICON-WAFER CHARACTERIZATION

被引：4
|
作者：
LAWSON, CM [1 ]
MICHAEL, RR [1 ]
机构：
[1] UNIV ALABAMA,DEPT PHYS,BIRMINGHAM,AL 35294
来源：
JOURNAL OF CRYSTAL GROWTH | 1994年 / 137卷 / 1-2期
关键词：
D O I：
10.1016/0022-0248(94)91243-2
中图分类号：
O7 [晶体学];
学科分类号：
0702 ; 070205 ; 0703 ; 080501 ;
摘要：
We report on the first use of fiber optic low-coherence interferometry (FOLCI) for non-invasive characterization of semiconductors. The FOLCI sensor system uses an edge-emitting light emitting diode (LED) operating at 1.55 Am as the source for a fiber optic Michelson interferometer. This system has been used to measure silicon wafer thickness and sensor-wafer separation to an accuracy of +/- 1.5 mum. In these measurements, the sensor head is positioned a centimeter away from the wafer under test.
引用
收藏
页码：37 / 40
页数：4
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