INFLUENCE OF SOURCE PARAMETERS ON PROPERTIES OF AN ION-BEAM

被引：8
|
作者：
WITTMAACK, K [1 ]
SCHULZ, F [1 ]
机构：
[1] GESELL STRAHLEN & UMWELT FORSCH, PHYS TECH ABT, 8042 NEUHERBERG, WEST GERMANY
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1973年 / 10卷 / 06期
关键词：
D O I：
10.1116/1.1318515
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：918 / 921
页数：4
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