共 50 条
- [3] Ion flux and ion distribution function measurements in synchronously pulsed inductively coupled plasmas [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2013, 31 (02):
- [5] Effect of low frequency power on the electron energy distribution function in argon inductively coupled plasmas [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2020, 38 (02):
- [6] The Radial Distribution of Ions and Electrons in RF Inductively Coupled H2/T2B Plasmas [J]. Plasma Chemistry and Plasma Processing, 2018, 38 : 281 - 292
- [8] Lorentz force effects on the electron energy distribution in inductively coupled plasmas [J]. PHYSICAL REVIEW E, 2001, 64 (02): : 10 - 264061