A REACTION SPUTTERING TYPE RF ION-SOURCE FOR SOLID ELEMENTS

被引：0
|
作者：
CHENG, SC
FU, DJ
ZHANG, H
PAN, XZ
机构：
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS | 1989年 / 37-8卷
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暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
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页码：136 / 139
页数：4
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