SURFACE-REACTIONS OF SIH, SIH4 AND SI2H6 STUDIED USING MOLECULAR-BEAM TECHNIQUES

被引:0
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作者
BUSS, RJ [1 ]
HO, P [1 ]
BREILAND, WG [1 ]
机构
[1] SANDIA NATL LABS,ALBUQUERQUE,NM 87185
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O6 [化学];
学科分类号
0703 ;
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页码:83 / PHYS
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