CARBON-OXYGEN COMPLEXES AS NUCLEI FOR THE PRECIPITATION OF OXYGEN IN CZOCHRALSKI SILICON

被引：35

|

作者：

OEHRLEIN, GS

LINDSTROM, JL

CORBETT, JW

机构：

来源：

APPLIED PHYSICS LETTERS | 1982年 / 40卷 / 03期

关键词：

D O I：

10.1063/1.93060

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：241 / 243

页数：3

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