SULFURIC-ACID PROTON EXCHANGED CHANNEL WAVE-GUIDES FABRICATED IN LINBO3

被引：11
|
作者：
BOGERT, GA
MOSER, DT
机构：
[1] AT&T Bell Laboratories, Breinigsville
来源：
IEEE PHOTONICS TECHNOLOGY LETTERS | 1990年 / 2卷 / 09期
关键词：
D O I：
10.1109/68.59333
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We present the first demonstration of proton exchanged channel waveguides formed in z-cut LiNbO3 by exchange in sulfuric acid. The single polarization guides can be produced using fabrication conditions similar to those previously reported for benzoic acid guides. Our process is entirely compatible with clean room facilities and wafer-level production. © 1990 IEEE
引用
收藏
页码：632 / 633
页数：2
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