MICROSCOPE IMAGING BY TIME-OF-FLIGHT SECONDARY ION MASS-SPECTROMETRY

被引：187
|
作者：
SCHUELER, BW
机构：
来源：
MICROSCOPY MICROANALYSIS MICROSTRUCTURES | 1992年 / 3卷 / 2-3期
关键词：
D O I：
10.1051/mmm:0199200302-3011900
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
The concept of Secondary Ion Microscopy, introduced by Castaing et al. [1], is applied to a direct imaging time-of-flight (TOF) mass spectrometer. The ion optical configuration for a particular [2] stigmatic imaging TOF mass spectrometer is reviewed. A number of fundamental factors influencing the mass resolution in any TOF spectrometer are discussed. The question of where microscope imaging offers advantages over microprobe imaging in TOF Secondary Ion Mass Spectrometry is addressed.
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页码：119 / 139
页数：21
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