NEW TOP SURFACE IMAGING APPROACH BASED ON THE LIGHT-INDUCED BUILT-UP DRY ETCH BARRIERS

被引：0
|
作者：
SCHAEDELI, U
HOFMANN, M
TINGUELY, E
MUNZEL, N
机构：
[1] CIBA GEIGY CORP,MAT RES,CH-1723 MARLY FRIBOURG,SWITZERLAND
[2] OCG MICROELECTR MAT AG,CH-4002 BASEL,SWITZERLAND
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 209卷
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D O I：
暂无
中图分类号：
O6 [化学];
学科分类号：
0703 ;
摘要：
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页码：65 / PMSE
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