INTERFACIAL REACTIONS OF COBALT THIN-FILMS ON (001) GAAS

被引：35

作者：

SHIAU, FY ^{[1
]}

CHANG, YA ^{[1
]}

CHEN, LJ ^{[1
]}

机构：

[1] NATL TSING HUA UNIV,DEPT MAT SCI & ENGN,HSINCHU 300,TAIWAN

来源：

JOURNAL OF ELECTRONIC MATERIALS | 1988年 / 17卷 / 05期

关键词：

D O I：

10.1007/BF02652130

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

引用

页码：433 / 441

页数：9

共 50 条

[1] THE INTERACTION BETWEEN THIN-FILMS OF COBALT AND GAAS (001) SUBSTRATES
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EIZENBERG, M
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[2] INTERFACIAL REACTIONS BETWEEN GOLD THIN-FILMS AND GAAS SUBSTRATES
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[4] METALLURGICAL STUDY OF NI/GAAS CONTACTS .2. INTERFACIAL REACTIONS OF NI THIN-FILMS ON (111) AND (001) GAAS
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[9] INTERFACIAL REACTIONS OF TITANIUM THIN-FILMS ON BF+(2)-IMPLANTED (001)SI
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[10] INTERFACIAL REACTIONS OF NICKEL THIN-FILMS ON BF2+-IMPLANTED (001)SI
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