PLASMA OXIDATION OF SILICON IN A MICROWAVE-DISCHARGE AND ITS SPECIFICITY

被引：10
|
作者：
MUSIL, J [1 ]
ZACEK, F [1 ]
BARDOS, L [1 ]
LONCAR, G [1 ]
DRAGILA, R [1 ]
机构：
[1] CZECH TECH UNIV, FAC NUCL SCI & PHYS ENGN, CS-11519 PRAGUE, CZECHOSLOVAKIA
来源：
JOURNAL OF PHYSICS D-APPLIED PHYSICS | 1979年 / 12卷 / 05期
关键词：
D O I：
10.1088/0022-3727/12/5/005
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：L61 / L63
页数：3
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