DEPOSITION OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES

被引：32

|

作者：

NAKAGAWA, Y

GOMI, Y

OKADA, T

机构：

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.338321

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

收藏

页码：5012 / 5017

页数：6

相关论文

共 50 条

[1] DEPOSITION OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS AND THEIR SURFACE ACOUSTIC-WAVE PROPERTIES
NAKAGAWA, Y
FERROELECTRICS, 1989, 93 : 13 - 20
[2] NEW PIEZOELECTRIC TA2O5 THIN-FILMS
NAKAGAWA, Y
GOMI, Y
APPLIED PHYSICS LETTERS, 1985, 46 (02) : 139 - 140
[3] MATERIAL CONSTANTS OF NEW PIEZOELECTRIC TA2O5 THIN-FILMS
NAKAGAWA, Y
OKADA, T
JOURNAL OF APPLIED PHYSICS, 1990, 68 (02) : 556 - 559
[4] PIEZOELECTRIC TA2O5 FILMS - PRODUCTION, ELASTIC AND ACOUSTIC PROPERTIES
ANISIMKIN, VI
KOTELYANSKII, IM
LUZANOV, VA
MAVLENKOV, PN
FIZIKA TVERDOGO TELA, 1989, 31 (04): : 230 - 233
[5] PROPERTIES OF TA2O5 AND TA2O5NX THIN-FILMS WAVEGUIDES
KADZIELA, J
LICZNERSKI, B
PATELA, S
RADOJEWSKI, J
OPTICA APPLICATA, 1984, 14 (01) : 139 - 143
[6] Thickness of Ta2O5 thin-films deposited by a new pulsed laser deposition technique
Inoue, N
Monnaka, T
Kashiwabara, S
Fujimoto, R
APPLIED SURFACE SCIENCE, 1998, 127 : 536 - 539
[7] MAGNETIC-PROPERTIES OF THE SENDUST TA2O5 MULTILAYER THIN-FILMS
HUR, JH
PARK, NT
KWON, SI
SONG, HS
CHANG, HS
JOURNAL OF APPLIED PHYSICS, 1990, 67 (09) : 5137 - 5138
[8] Surface Acoustic Wave Properties of Amorphous Ta2O5 and Nb2O5 Thin Films Prepared by Radio Frequency Sputtering
Kakio, Shoji
Hosaka, Keiko
Arakawa, Mototaka
Ohashi, Yuji
Kushibiki, Jun-ichi
JAPANESE JOURNAL OF APPLIED PHYSICS, 2012, 51 (07)
[9] SURFACE ACOUSTIC-WAVE PROPERTIES OF TANTALUM PENTOXIDE THIN-FILMS ON YX QUARTZ
WELLER, JF
GIALLORENZI, TG
IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1974, MT22 (11) : 973 - 975
[10] DIELECTRIC PROPERTIES OF TA2O5 THIN FILMS
PULFREY, DL
WILCOX, PS
YOUNG, L
JOURNAL OF APPLIED PHYSICS, 1969, 40 (10) : 3891 - &

← 1 2 3 4 5 →