STRUCTURAL STUDIES OF LOW-TEMPERATURE LOW-PRESSURE CHEMICAL DEPOSITED POLYCRYSTALLINE SILICON

被引：91

作者：

MEAKIN, D ^{[1
]}

STOEMENOS, J ^{[1
]}

MIGLIORATO, P ^{[1
]}

ECONOMOU, NA ^{[1
]}

机构：

[1] ARISTOTLE UNIV THESSALONIKI,DEPT PHYS,GR-54006 THESSALONIKI,GREECE

来源：

JOURNAL OF APPLIED PHYSICS | 1987年 / 61卷 / 11期

关键词：

D O I：

10.1063/1.338325

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：5031 / 5037

页数：7

共 50 条

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[J]. APPLIED PHYSICS LETTERS, 1988, 52 (17) : 1389 - 1391

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