A REVISED VERSION OF PRAL - THE PROJECTED RANGE ALGORITHM

被引:7
|
作者
ASHWORTH, DG
BOWYER, MDJ
OVEN, R
机构
[1] Electronic Engineering Laboratories, University of Kent, Canterbury, Kent
关键词
D O I
10.1088/0022-3727/24/8/022
中图分类号
O59 [应用物理学];
学科分类号
摘要
PRAL, a projected range algorithm is widely used to predict the first few moments of the spatial distribution of ions implanted into amorphous targets of infinite extent. It is shown here that PRAL contains mathematical defects. These are corrected in the new Kent range algorithm (KRAL) which is shown to be compatible with LSS theory. KRAL and PRAL predict the same range but the new algorithm is superior in its predictions of lateral and longitudinal standard deviations when compared with moments derived from the Monte Carlo code TRIM using the same differential nuclear scattering cross sections and electronic energy loss mechanisms.
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页码:1376 / 1380
页数:5
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