SPATIAL-FILTERING MICROSCOPE FOR LINEWIDTH MEASUREMENTS

被引：5
|
作者：
YOUNG, M
机构：
来源：
APPLIED OPTICS | 1989年 / 28卷 / 08期
关键词：
D O I：
10.1364/AO.28.001467
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
引用
收藏
页码：1467 / 1473
页数：7
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