SPECTROSCOPIC STUDIES OF RADIO-FREQUENCY INDUCED PLASMA .1. DEVELOPMENT AND CHARACTERIZATION OF EQUIPMENT

被引:34
|
作者
TRUITT, D
ROBINSON, JW
机构
关键词
D O I
10.1016/S0003-2670(00)86815-4
中图分类号
O65 [分析化学];
学科分类号
070302 ; 081704 ;
摘要
引用
收藏
页码:401 / &
相关论文
共 50 条
  • [1] Spectroscopic characterization of a radio-frequency argon plasma jet discharge in ambient air
    Cullen, P. J.
    Milosavljevic, V.
    [J]. PROGRESS OF THEORETICAL AND EXPERIMENTAL PHYSICS, 2015, 2015 (06):
  • [2] PLASMA POLYMERIZATION OF TETRAFLUOROETHYLENE .1. INDUCTIVE RADIO-FREQUENCY DISCHARGE
    YASUDA, H
    MOROSOFF, N
    BRANDT, ES
    REILLEY, CN
    [J]. JOURNAL OF APPLIED POLYMER SCIENCE, 1979, 23 (04) : 1003 - 1011
  • [3] Radio-Frequency Heating Equipment
    Hawkins, R. R.
    [J]. LIBRARY JOURNAL, 1949, 74 (22) : 1914 - 1914
  • [4] STUDIES OF RADIO-FREQUENCY CURRENT DRIVE IN A PLASMA
    BHADRA, DK
    CHU, C
    HARVEY, RW
    PRATER, R
    [J]. PLASMA PHYSICS AND CONTROLLED FUSION, 1983, 25 (04) : 361 - 385
  • [5] Temperature distributions of radio-frequency plasma in water by spectroscopic analysis
    Mukasa, Shinobu
    Nomura, Shinfuku
    Toyota, Hiromichi
    Maehara, Tsunehiro
    Abe, Fumiaki
    Kawashima, Ayato
    [J]. JOURNAL OF APPLIED PHYSICS, 2009, 106 (11)
  • [6] Characterization of radio-frequency sputtered AIN films by spectroscopic ellipsometry
    Huang, D.
    Uppireddi, K.
    Pantojas, V. M.
    Otano-Rivera, W.
    Weiner, B. R.
    Morell, G.
    [J]. NANOCOATINGS, 2007, 6647
  • [7] Characterization of the plasma in a radio-frequency magnetron sputtering system
    Palmero, A
    van Hattum, ED
    Arnoldbik, WM
    Vredenberg, AM
    Habraken, FHPM
    [J]. JOURNAL OF APPLIED PHYSICS, 2004, 95 (12) : 7611 - 7618
  • [8] RADIO-FREQUENCY EQUIPMENT FOR URAGAN STELLARATORS
    Korovin, V. B.
    Kramskoy, E. D.
    [J]. PROBLEMS OF ATOMIC SCIENCE AND TECHNOLOGY, 2012, (06): : 19 - 21
  • [9] DEVELOPMENT, DIAGNOSTIC AND APPLICATIONS OF RADIO-FREQUENCY PLASMA REACTOR
    Puac, N.
    [J]. 24TH SUMMER SCHOOL AND INTERNATIONAL SYMPOSIUM ON THE PHYSICS OF IONIZED GASES, CONTRIBUTED PAPERS, 2008, (84): : 263 - 263
  • [10] Development, diagnostic and applications of radio-frequency plasma reactor
    Puac, N.
    [J]. 24TH SUMMER SCHOOL AND INTERNATIONAL SYMPOSIUM ON THE PHYSICS OF IONIZED GASES, 2008, 133