FABRICATION OF HEMISPHERICAL STRUCTURES USING SEMICONDUCTOR TECHNOLOGY FOR USE IN THERMONUCLEAR FUSION-RESEARCH

被引：12
|
作者：
WISE, KD [1 ]
JACKSON, TN [1 ]
MASNARI, NA [1 ]
ROBINSON, MG [1 ]
SOLOMON, DE [1 ]
WUTTKE, GH [1 ]
RENSEL, WB [1 ]
机构：
[1] KMS FUSION INC,ANN ARBOR,MI 48106
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1979年 / 16卷 / 03期
关键词：
D O I：
10.1116/1.570116
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：936 / 939
页数：4
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