SILANE DISSOCIATION MECHANISMS AND THIN-FILM FORMATION IN A LOW-PRESSURE MULTIPOLE DC DISCHARGE

被引：82
|
作者：
DREVILLON, B [1 ]
HUC, J [1 ]
LLORET, A [1 ]
PERRIN, J [1 ]
DEROSNY, G [1 ]
SCHMITT, JPM [1 ]
机构：
[1] ECOLE POLYTECH,PHYS MILIEUX IONISES LAB,F-91128 PALAISEAU,FRANCE
来源：
APPLIED PHYSICS LETTERS | 1980年 / 37卷 / 07期
关键词：
D O I：
10.1063/1.92008
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：646 / 648
页数：3
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