CARBIDE CONTAMINATION OF SILICON SURFACES

被引：94
|
作者：
HENDERSON, RC
MARCUS, RB
POLITO, WJ
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1971年 / 42卷 / 03期
关键词：
D O I：
10.1063/1.1660168
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
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页码：1208 / +
页数：1
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