Effective Sputtering Yields of Titanium, Titanium Nitride, and Molybdenum Induced by Nitrogen Ions and Ions of Nitrogen-Oxygen Mixtures

被引：12

作者：

Dukhopel'nikov, D. V. ^{[1
]}

Riazanov, V. A. ^{[1
]}

Vorob'ev, E. V. ^{[1
]}

Abgarian, V. K. ^{[2
]}

Popov, G. A. ^{[2
]}

Khartov, S. A. ^{[2
]}

机构：

[1] Bauman Moscow State Tech Univ, Moscow 105005, Russia

[2] Natl Res Univ, Moscow Aviat Inst, Res Inst Appl Mech & Electrodynam, Moscow 125993, Russia

来源：

JOURNAL OF SURFACE INVESTIGATION | 2016年 / 10卷 / 06期

关键词：

sputtering yields; electric jet engines; reactive sputtering; ion beams; surface topology;

D O I：

10.1134/S1027451016050712

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

This work is dedicated to studying the effects of nitrogen ions and ions of nitrogen and oxygen mixtures on the surface of titanium, titanium nitride, and molybdenum. The usage of magnetron sputtering systems as a model device to study the effect of reactive gases on elements of electric jet engines is proposed and justified. The processes of sputtering of a surface exposed to non-monoenergetic ion beams are studied. The effective sputtering yields of titanium, titanium nitride, and molybdenum induced by argon and nitrogen ions and ions of nitrogen-oxygen mixtures at various intermediate-energy ion beams are determined. It is shown that the sputtering yields of reactive-gas ions are significantly lower than the sputtering yields of inert gases.

引用

页码：1202 / 1207

页数：6

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