CONTRIBUTION OF ANISOTROPIC VELOCITY DISTRIBUTION OF RECOIL ATOMS TO SPUTTERING YIELDS AND ANGULAR-DISTRIBUTIONS OF SPUTTERED ATOMS

被引：53
|
作者：
YAMAMURA, Y
机构：
来源：
RADIATION EFFECTS AND DEFECTS IN SOLIDS | 1981年 / 55卷 / 1-2期
关键词：
D O I：
10.1080/00337578108225465
中图分类号：
TL [原子能技术]; O571 [原子核物理学];
学科分类号：
0827 ; 082701 ;
摘要：
引用
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页码：49 / 55
页数：7
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