SURVEY OF OPTIONS IN A BALANCED SYSTEM FOR PRODUCTION OF SILICON BY THERMAL-DECOMPOSITION OF TRICHLOROSILANE

被引：0
|
作者：
BLOCHER, JM [1 ]
BROWNING, MF [1 ]
WILSON, WJ [1 ]
机构：
[1] BATTELLE MEM INST,COLUMBUS LABS,COLUMBUS,OH 43201
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1979年 / 126卷 / 08期
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D O I：
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中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
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页码：C350 / C350
页数：1
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