Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm

被引：0
|
作者：
Zhou Bin [1 ]
Gao Zhong-yu [1 ]
Chen Huai [1 ]
Zhang Rong [1 ]
Chen Zhi-yong [1 ]
机构：
[1] Tsinghua Univ, Dept Precis Instruments & Mech, Beijing 100084, Peoples R China
来源：
FRONTIERS OF MECHANICAL ENGINEERING | 2006年 / 1卷 / 01期
关键词：
micromachine; gyroscope; digital readout; LMSD; floating-type DSP;
D O I：
10.1007/s11465-005-0016-5
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
A new digital readout system for micromachined gyroscope has been proposed to implement flexible parameter adjustment, improve the control performance of gyroscope, and make error compensation. By digitalizing the output of the gyroscope, this system uses a floating-type digital signal processor (DSP) to process the signal demodulation and achieve the feedback control of the gyroscope. Therefore, the small change of capacitance in the micromachined gyroscope can be detected. A new demodulation algorithm of least mean square demodulation (LMSD) has been developed inside DSP. Simulation and measurement results show that LMSD can improve 29% of the noise performance compared with the typical multiplication method. In air pressure, a kind of vibration-wheel micromachined gyroscope has achieved a noise level of 0.0073 deg s(-1) . Hz(-1/2) over the 100-Hz bandwidth by using this digital readout technology.
引用
收藏
页码：106 / 110
页数：5
相关论文
共 50 条
  • [1] Digital Readout System for Micromachined Gyroscope and Analysis for its Demodulation Algorithm
    Bin Zhou
    Zhong-yu Gao
    Huai Chen
    Rong Zhang
    Zhi-yong Chen
    Frontiers of Mechanical Engineering in China, 2006, 1 (1): : 106 - 110
  • [2] A Novel Demodulation Algorithm for MEMS Gyroscope Digital Control System
    Yang, Cheng
    Li, Hongsheng
    2014 IEEE INTERNATIONAL CONFERENCE ON SYSTEMS, MAN AND CYBERNETICS (SMC), 2014, : 940 - 945
  • [3] Design and test of silicon micromachined gyroscope control system based on Fourier demodulation algorithm
    Li, H. (hsli@seu.edu.cn), 1600, Southeast University (44):
  • [4] A new micromachined gyroscope with digital output
    Lang, M
    Grossmann, M
    Prütz, O
    Koster, M
    Franz, J
    Wucher, G
    Mayer, T
    Gangei, A
    Steiger, E
    ADVANCED MICROSYSTEMS FOR AUTOMOTIVE APPLICATIONS 2003, 2003, : 127 - 136
  • [5] Synchronous integrator based on digital control system for silicon Micromachined gyroscope
    Yang, Cheng
    Li, Hongsheng
    2015 2ND IEEE INTERNATIONAL SYMPOSIUM ON INERTIAL SENSORS AND SYSTEMS (ISISS), 2015, : 117 - 120
  • [6] Design of Digital Micromachined Thermal Gas Gyroscope
    Chu, Hongjie
    Zhu, Xinhua
    Su, Yan
    MEMS, NANO AND SMART SYSTEMS, PTS 1-6, 2012, 403-408 : 3297 - 3304
  • [7] Design and analysis of a micromachined gyroscope
    Zarei, Nilgoon
    Leung, Albert
    Jones, John D.
    MICROFLUIDICS, BIOMEMS, AND MEDICAL MICROSYSTEMS X, 2012, 8251
  • [8] Improved Structural Design and Digital Control System for Micromachined Tuning Fork Gyroscope
    Wen, Jiao
    Liu, Xiaoming
    Zhu, Zhonggan
    Cai, Ming
    MANUFACTURING SCIENCE AND TECHNOLOGY, PTS 1-8, 2012, 383-390 : 5997 - 6002
  • [9] Digital Control and Demodulation Algorithm for Compact Open-Loop Fiber-Optic Gyroscope
    Chen, Lin
    Huang, Zhao
    Mao, Yuzheng
    Jiang, Biqiang
    Zhao, Jianlin
    SENSORS, 2023, 23 (03)
  • [10] A micromachined electrostatically suspended gyroscope with digital force feedback
    Damrongsak, B
    Kraft, M
    2005 IEEE SENSORS, VOLS 1 AND 2, 2005, : 401 - 404
12345