MEASUREMENTS OF ALPHA-EMITTING CONTAMINANTS IN SEMICONDUCTOR MANUFACTURING MATERIALS

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作者：
BOULDIN, DP [1 ]
机构：
[1] IBM CORP,DIV GEN TECHNOL,ESSEX JUNCTION,VT 05452
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1980年 / 180卷 / AUG期
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：147 / NUCL
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