LOW-FREQUENCY DIELECTRIC-PROPERTIES OF AL/AL2/AU STRUCTURES IN THIN-FILMS

被引：6

|

作者：

DELAUNAY, G

ROPARS, F

DESPUJOLS, J

机构：

来源：

THIN SOLID FILMS | 1982年 / 87卷 / 02期

关键词：

D O I：

10.1016/0040-6090(82)90267-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

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页码：127 / 140

页数：14

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