CHEMICAL COMPOSITION AND ELECTRICAL PROPERTIES OF TIN OXIDE-FILMS PREPARED BY VAPOR-DEPOSITION

被引:86
|
作者
ABOAF, JA
MARCOTTE, VC
CHOU, NJ
机构
[1] IBM CORP,E FISHKILL FAC,SYST PROD DIV,HOPEWELL JUNCTION,NY 12533
[2] IBM CORP,THOMAS WATSON RES CTR,YORKTOWN HTS,NY 10598
关键词
D O I
10.1149/1.2403539
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
引用
收藏
页码:701 / 702
页数:2
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