HIGH-FREQUENCY SURFACE-WAVE TRANSDUCERS FABRICATED BY X-RAY LITHOGRAPHY

被引：0
|
作者：
SPEARS, DL [1 ]
SMITH, HI [1 ]
机构：
[1] MIT,LINCOLN LAB,LEXINGTON,MA 02173
来源：
IEEE TRANSACTIONS ON SONICS AND ULTRASONICS | 1973年 / SU20卷 / 01期
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D O I：
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中图分类号：
O42 [声学];
学科分类号：
070206 ; 082403 ;
摘要：
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页码：59 / &
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