IMAGING WITH A LOW-ENERGY-ELECTRON MICROSCOPE

被引：31
|
作者：
TROMP, RM
REUTER, MC
机构：
[1] T.J. Watson Research Center, IBM Research Division, Yorktown Heights, NY 10598
来源：
ULTRAMICROSCOPY | 1993年 / 50卷 / 02期
关键词：
D O I：
10.1016/0304-3991(93)90007-K
中图分类号：
TH742 [显微镜];
学科分类号：
摘要：
Low-energy electron microscopy (LEEM) is a relatively new technique for real-time imaging of surfaces. Lateral resolution is in the 150 angstrom range and single-height atomic steps can be observed. In this paper we describe how to set up a low-energy electron microscope and obtain images in the different imaging modes.
引用
收藏
页码：171 / 178
页数：8
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