Vacuum Technology as trend-setting Key Technology The Requirements are the Applications

被引：0

作者：

Barfuss, Heinz ^{[1
]}

机构：

[1] Pfeiffer Vacuum GmbH, Asslar, Germany

来源：

关键词：

D O I：

10.1002/vipr.201870501

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

引用

页码：3 / 3

页数：1

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