PLASMOCHEMICAL DEVICE FOR DEPOSITION OF THIN-FILMS IN VACUUM

被引：0
|
作者：
MESHCHERYAKOV, NA [1 ]
ORLIK, YG [1 ]
SHMURATKO, YD [1 ]
机构：
[1] ACAD SCI USSR,AUTOM & ELECT MEASUREMENT INST,NOVOSIBIRSK,USSR
来源：
PRIBORY I TEKHNIKA EKSPERIMENTA | 1975年 / 04期
关键词：
D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
引用
收藏
页码：216 / 218
页数：3
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