GET SUBMICROMETER RESOLUTION WITH OPTICAL LITHOGRAPHY

被引：0
|
作者：
SCHOEFFEL, JA [1 ]
OLDHAM, WG [1 ]
机构：
[1] UNIV CALIF BERKELEY,BERKELEY,CA 94720
来源：
RESEARCH & DEVELOPMENT | 1987年 / 29卷 / 01期
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D O I：
暂无
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
引用
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页码：92 / 95
页数：4
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