DEPOSITION OF OPTICAL COATINGS - PROCESS-CONTROL AND AUTOMATION

被引：14

|

作者：

THOENI, WP

机构：

来源：

THIN SOLID FILMS | 1982年 / 88卷 / 04期

关键词：

D O I：

10.1016/0040-6090(82)90178-X

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

引用

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页码：385 / 397

页数：13

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