DIFFUSION OF GALLIUM IN THIN GOLD-FILMS ON GAAS

被引：19
|
作者：
GUPTA, RP
KHOKLE, WS
WUERFL, J
HARTNAGEL, HL
机构：
[1] Semiconductor Devices Area, Central Electronics Engineering Research Institute, Pilani, Rajasthan 333031, India
来源：
THIN SOLID FILMS | 1987年 / 151卷 / 03期
关键词：
CHEMICAL ANALYSIS - GOLD AND ALLOYS - Thin Films - HEAT TREATMENT - SEMICONDUCTING GALLIUM ARSENIDE - SPECTROSCOPY; ELECTRON;
D O I：
10.1016/0040-6090(87)90145-3
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Gold-based multicomponent metallization systems are commonly used for making contacts to GaAs and other compound semiconductors. Gallium has been reported to migrate rapidly in the overlying gold film but quantitative data concerning diffusion of gallium in gold are not available. Therefore electron spectroscopy for chemical analysis (ESCA) investigations were undertaken to determine the diffusivity of gallium in gold, which is of great technological importance particularly for optimizing ohmic and Schottky contacts to GaAs.
引用
收藏
页码：L121 / L125
页数：5
相关论文
共 50 条
  • [1] AMBIENT EFFECTS ON THE OUT-DIFFUSION OF GAAS THROUGH THIN GOLD-FILMS
    CHANG, CA
    CHOU, NJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1980, 17 (06): : 1358 - 1359
  • [2] DIFFUSION AND REACTIONS IN GOLD-FILMS
    POATE, JM
    SOLID STATE TECHNOLOGY, 1982, 25 (04) : 227 - 234
  • [3] ANOMALOUS ELECTRON-DIFFUSION IN IRRADIATED THIN GOLD-FILMS
    CARL, A
    DUMPICH, G
    BUCHAL, C
    STRITZKER, B
    ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1993, 90 (03): : 261 - 266
  • [4] RESISTIVITY OF THIN GOLD-FILMS
    SAMBLES, JR
    ELSOM, KC
    JARVIS, DJ
    SOLID STATE COMMUNICATIONS, 1979, 32 (11) : 997 - 1000
  • [5] MAGNETORESISTANCE OF THIN INHOMOGENEOUS GOLD-FILMS
    CARL, A
    DUMPICH, G
    WASSERMANN, EF
    VACUUM, 1990, 41 (4-6) : 1195 - 1197
  • [6] ANOMALOUS DIFFRACTION IN THIN GOLD-FILMS
    JOSEYACAMAN, M
    TRUSZKOWSKA, K
    GOMEZ, A
    CASTANO, V
    ZIRONI, EP
    PHILOSOPHICAL MAGAZINE A-PHYSICS OF CONDENSED MATTER STRUCTURE DEFECTS AND MECHANICAL PROPERTIES, 1985, 51 (02): : 315 - 327
  • [7] INTERACTION OF THIN GOLD-FILMS WITH SILICON
    LIFSHITS, VG
    AKILOV, VB
    GAVRILJUK, YL
    SOLID STATE COMMUNICATIONS, 1981, 40 (04) : 429 - 432
  • [8] ANISOTROPIC MAGNETORESISTANCE IN THIN INHOMOGENEOUS GOLD-FILMS
    DUMPICH, G
    FRIEDRICHOWSKI, S
    ZEITSCHRIFT FUR PHYSIK B-CONDENSED MATTER, 1994, 94 (1-2): : 3 - 7
  • [9] EFFECTS OF AMBIENT GAS ON THE DIFFUSION OF COPPER THROUGH THIN CHROMIUM FILMS AND OF NICKEL THROUGH THIN GOLD-FILMS
    RAY, SK
    LEWIS, RK
    THIN SOLID FILMS, 1985, 131 (3-4) : 197 - 203
  • [10] PICOSECOND THERMAL PULSES IN THIN GOLD-FILMS
    MARCIAKKOZLOWSKA, J
    MUCHA, Z
    KOZLOWSKI, M
    INTERNATIONAL JOURNAL OF THERMOPHYSICS, 1995, 16 (06) : 1489 - 1497
12345