THE SYNTHESIS OF DIAMOND FILM BY USING AN RF COUPLED COMBUSTION FLAME PLASMA

被引：0
|
作者：
HOZUMI, A
AKASHI, K
机构：
来源：
DENKI KAGAKU | 1992年 / 60卷 / 07期
关键词：
COMBUSTION FLAME; DIAMOND FILM; RF POWER;
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
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页码：657 / 658
页数：2
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