OPTIMIZATION OF ULTRASONIC ELECTRODEPOSITION OF TIN-BISMUTH ALLOY IN CHANNELS OF NARROW COMMUTATION HOLES IN INTEGRATED-CIRCUITS

被引：0
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作者：
SERYANOV, YV
KVYATKOVSKAYA, LM
GRISHANIN, VA
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来源：
PROTECTION OF METALS | 1993年 / 29卷 / 06期
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TF [冶金工业];
学科分类号：
0806 ;
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页码：767 / 770
页数：4
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