A THIN-FILM BOLOMETER USING POROUS SILICON TECHNOLOGY

被引：27
|
作者：
LANG, W
STEINER, P
SCHABER, U
RICHTER, A
机构：
[1] Fraunhofer-Institut for Solid State Technology, Munich
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 1994年 / 43卷 / 1-3期
关键词：
D O I：
10.1016/0924-4247(93)00691-V
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A thin film bolometer for thermal measurement is presented. The sensor has a metal resistor on a free standi membrane. For the realization of the membrane porous silicon is used as a thick sacrificial layer.
引用
收藏
页码：185 / 187
页数：3
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