OBSERVATION OF CRYSTALLINE C3N4

被引：536
|
作者：
YU, KM
COHEN, ML
HALLER, EE
HANSEN, WL
LIU, AY
WU, IC
机构：
[1] UNIV CALIF BERKELEY, DEPT PHYS, BERKELEY, CA 94720 USA
[2] LAWRENCE BERKELEY LAB, DIV MAT SCI, BERKELEY, CA 94720 USA
[3] UNIV CALIF BERKELEY, DEPT MAT SCI & MINERAL ENGN, BERKELEY, CA 94720 USA
来源：
PHYSICAL REVIEW B | 1994年 / 49卷 / 07期
关键词：
D O I：
10.1103/PhysRevB.49.5034
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
We present strong experimental evidence suggesting that we have synthesized the beta-C3N4 phase. This is a material predicted by theory to have bulk moduli comparable to diamond. Thin films containing small crystals were deposited on Si and Ge wafers by rf diode sputtering of a pure graphite target with pure N2. The crystal structure of these phases was investigated using x-ray and electron-beam diffractometry as well as transmission electron microscopy. Our results indicate that the beta-C3N4 particles with typical dimensions of approximately 0.5 mum are embedded in a 1-mum-thick layer of a C-N polymer. These particles are believed to crystallize preferentially on Si (100) wafers.
引用
收藏
页码：5034 / 5037
页数：4
相关论文
共 50 条
  • [1] Crystalline β-C3N4 synthesized by MPCVD
    Gu, YS
    Zhang, YP
    Duan, ZJ
    Chang, XR
    Tian, ZZ
    Chen, NX
    Dong, C
    Shi, DX
    Zhang, XF
    Yuan, L
    [J]. JOURNAL OF MATERIALS SCIENCE, 1999, 34 (13) : 3117 - 3125
  • [2] Crystalline β-C3N4 synthesized by MPCVD
    Y. S. Gu
    Y. P. Zhang
    Z. J. Duan
    X. R. Chang
    Z. Z. Tian
    N. X. Chen
    C. Dong
    D. X. Shi
    X. F. Zhang
    L. Yuan
    [J]. Journal of Materials Science, 1999, 34 : 3117 - 3125
  • [3] Synthesis of crystalline C3N4 by MPCVD
    Shi, D.X.
    Zhang, X.F.
    Yuan, L.
    Gu, Y.S.
    Zhang, Y.P.
    Duan, Z.J.
    Chang, X.R.
    Tian, Z.Z.
    Chen, N.X.
    [J]. Applied Surface Science, 1999, 148 (01): : 50 - 55
  • [4] Synthesis of crystalline C3N4 by MPCVD
    Shi, DX
    Zhang, XF
    Yuan, L
    Gu, YS
    Zhang, YP
    Duan, ZJ
    Chang, XR
    Tian, ZZ
    Chen, NX
    [J]. APPLIED SURFACE SCIENCE, 1999, 148 (1-2) : 50 - 55
  • [5] Synthesis and characterization of C3N4 crystalline films on silicon
    Chen, Y
    Guo, LP
    Chen, F
    Wang, EG
    [J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 1996, 8 (45) : L685 - L690
  • [6] On the validity of the formation of crystalline carbon nitrides, C3N4
    Matsumoto, S
    Xie, EQ
    Izumi, F
    [J]. DIAMOND AND RELATED MATERIALS, 1999, 8 (07) : 1175 - 1182
  • [7] Synthesis of crystalline C3N4 films and the new C-N phases
    Chen, Y
    Johnson, DJ
    Prince, RH
    Guo, LP
    Wang, EG
    [J]. THIN FILMS - STRUCTURE AND MORPHOLOGY, 1997, 441 : 717 - 722
  • [8] Investigation of structure and composition of crystalline carbon nitride β-C3N4
    Xu, S
    Li, HS
    Lee, S
    Li, YA
    Luo, WY
    Tien, OJ
    Ahn, J
    Huan, CHA
    [J]. PROCESSING AND FABRICATION OF ADVANCED MATERIALS VI, VOLS 1 & 2, 1998, : 853 - 859
  • [9] Effect of methane concentration on the growth of crystalline C3N4 films
    Chen, Y
    Guo, LP
    Wang, EG
    [J]. JOURNAL OF CRYSTAL GROWTH, 1997, 179 (3-4) : 515 - 521
  • [10] Effect of methane concentration on the growth of crystalline C3N4 films
    Chinese Acad of Sciences, Beijing, China
    [J]. J Cryst Growth, 3-4 (515-521):
12345